ASTM F1376-92(R2020) pdf free download
ASTM F1376-92(R2020) pdf free download.Standard Guide for Metallurgical Analysis for Gas Distribution System Components
1. Scope
1.1 This guide covers corrosion resistant metallic alloys of the general class stainless steel, containing chromium, nickel, manganese, and silicon as major alloying additions and possi- bly molybdenum, that are qualified or specified for the mate- rials of components used in high-purity gas supply systems for the semiconductor industry. This guide is primarily intended for testing to determine conformance to applicable composition and metallurgical specifications as stated in supplier product specifications or customer purchase specifications, or both. 1.2 Elements analyzed and reported in this guide are as follows: 1.2.1 The alloying additions chromium, nickel, and molyb- denum (if specified in alloy, as in type 316L), 1.2.2 The minor elements and residuals manganese, silicon, copper, cobalt, and stabilizers such as titanium and columbium (niobium), if present, 1.2.3 Carbon, sulfur and phosphorus, 1.2.4 Nitrogen and oxygen gases, 1.2.5 Any additional minor element additions that may be made as part of the melting and casting practice, such as aluminum and calcium, 1.2.6 Available standard analytical and reporting techniques are described for these elements. 1.3 Metallurgical characteristics to be analyzed and reported are inclusion contents, grain structure, mechanical properties, and intergranular corrosion susceptibility. 1.4 Limitations: 1.4.1 This guide is limited to corrosion resistant metal alloys of the general class stated in the Scope.1.4.2 The test methods cited in this guide are not intended to preclude the use of other generally accepted techniques of demonstrated equivalent or superior precision and bias. 1.4.3 Inclusion of testing and analysis procedures for any given element or metallurgical characteristic in this guide is not to be construed as being a requirement for incorporation ofthat element or metallurgical characteristic into any specifications. 1.5 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only. 1.6 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appro- priate safety, health, and environmental practices and deter- mine the applicability ofregulatory limitations prior to use. 1.7 This international standard was developed in accor- dance with internationally recognized principles on standard- ization established in the Decision on Principles for the Development of International Standards, Guides and Recom- mendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
4. Significance and Use
4.1 This guide defines a procedure for testing components being considered for installation into a high-purity gas distri- bution system. Application of this guide is expected to yield comparable data among components tested for purposes of qualification for this installation. 4.2 This guide establishes a procedure for determining the elemental composition and metallurgical characteristics of metal used to fabricate components for high purity gas distri- bution systems in the semiconductor industry. The composition and metallurgy of stainless steel may be expected to affect properties of importance to this application, including surface roughness, incidence of surface defects, passivation, corrosion resistance, and welding.
6. Procedure
6.1 The general requirements ofSpecification A484/A484M prevail for verification analysis, sampling, and test methods. 6.2 Specification A479/A479M prevails for the determina- tion of conformance of test results to ASTM standard require- ments. 6.3 Chemical Analysis: 6.3.1 The definitions, reference methods, practices, and reporting related to the chemical analysis of stainless steel alloys for this application shall be in accordance with Test Methods A751.6.6 Mechanical Properties: 6.6.1 The definitions, practices, and reporting of the me- chanical properties of stainless steel alloys for this application are in accordance with Test Methods and Definitions A370. 6.6.2 The tension test properties (tensile strength, yield strength, elongation and reduction of area) of metals for this application are determined in accordance with Test Methods E8. Apparatus, test procedures, and data analysis are described in the appropriate sections of this test method. 6.6.3 An example of data for mechanical properties is provided in Table 4. 6.7 Susceptibility to Intergranular Corrosion: 6.7.1 Susceptibility to intergranular attack due to precipita- tion of chromium carbides at the grain boundaries is detected by the test methods of Practices A262. Apparatus, test proce- dures and data analysis are described in the appropriate sections of Practices A262. 6.7.2 Screen samples for susceptibility to intergranular at- tacks by use of Practices A262, Practice A. Etch structures classified as“ Step” or “Dual” shall be acceptable. 6.7.3 Subject etch structures classified as “Ditch Structures” as described in Practices A262, Practice A, must be further tested in accordance with Practices A262, Practice E, to determine susceptibility to intergranular attack. Acceptance criteria is in accordance with Practice E. Report results.
